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1

X-ray photoelectron spectroscopy on implanted argon as a tool to follow local structural changes in thin films

Atena Rastgoo Lahrood, Teresa de los Arcos, Marina Prenzel, Achim von Keudell, Jörg Winter

Journal:

Thin Solid Films

Année:

2011

Langue:

english

Fichier:

PDF, 571 KB

english, 2011

2

Various Shapes of Plasma Spokes Observed in HiPIMS

Hecimovic, Ante, von Keudell, Achim, Gathen, Volker Schulz-von der, Winter, Jorg

Journal:

IEEE Transactions on Plasma Science

Année:

2014

Langue:

english

Fichier:

PDF, 382 KB

english, 2014

3

Foundations of low-temperature plasma physics - an introduction

von Keudell, Achim, Schulz-von der Gathen, Volker

Journal:

Plasma Sources Science and Technology

Année:

2017

Langue:

english

Fichier:

PDF, 1.35 MB

english, 2017

4

Electron density, temperature and the potential structure of spokes in HiPIMS

Held, Julian, Maaß, Philipp Alexander, Schulz-von der Gathen, Volker, von Keudell, Achim

Journal:

Plasma Sources Science and Technology

Année:

2019

Langue:

english

Fichier:

PDF, 953 KB

english, 2019

5

Elimination of Biological Contaminations from Surfaces by Plasma Discharges: Chemical Sputtering

Hubert Rauscher, Ondřej Kylián, Jan Benedikt, Achim von Keudell, François Rossi

Journal:

Année:

2010

Langue:

english

Fichier:

PDF, 615 KB

english, 2010

6

Elementary processes in plasma–surface interaction: H-atom and ion-induced chemisorption of methyl on hydrocarbon film surfaces

Achim von Keudell, Wolfgang Jacob

Journal:

Progress in Surface Science

Année:

2004

Langue:

english

Fichier:

PDF, 633 KB

english, 2004

7

Formation of polymer-like hydrocarbon films from radical beams of methyl and atomic hydrogen

Achim von Keudell

Journal:

Thin Solid Films

Année:

2002

Langue:

english

Fichier:

PDF, 536 KB

english, 2002

8

BIODECON: Plasma Decontamination in Medical Technology

Peter Awakowicz, Achim von Keudell

Journal:

Plasma Processes and Polymers

Année:

2006

Langue:

english

Fichier:

PDF, 50 KB

english, 2006

9

Anomalous Roughness Scaling of Well-Ordered Amorphous Fluorocarbon Films Deposited from an Octafluorocyclobutane Plasma

Tim Baloniak, Achim von Keudell

Journal:

Plasma Processes and Polymers

Année:

2008

Langue:

english

Fichier:

PDF, 365 KB

english, 2008

10

Removal of Model Proteins Using Beams of Argon Ions, Oxygen Atoms and Molecules: Mimicking the Action of Low-Pressure Ar/O2 ICP Discharges

Ondřej Kylián, Jan Benedikt, Lucel Sirghi, Rüdiger Reuter, Hubert Rauscher, Achim von Keudell, François Rossi

Journal:

Plasma Processes and Polymers

Année:

2009

Langue:

english

Fichier:

PDF, 500 KB

english, 2009

11

A Physicist's Perspective on “Views on Macroscopic Kinetics of Plasma Polymerisation”

Achim von Keudell, Jan Benedikt

Journal:

Plasma Processes and Polymers

Année:

2010

Langue:

english

Fichier:

PDF, 122 KB

english, 2010

12

The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure

Rüdiger Reuter, Katja Rügner, Dirk Ellerweg, Teresa de los Arcos, Achim von Keudell, Jan Benedikt

Journal:

Plasma Processes and Polymers

Année:

2012

Langue:

english

Fichier:

PDF, 551 KB

english, 2012

13

Functional plasma polymers deposited in capacitively and inductively coupled plasmas

Hegemann, Dirk, Korner, Enrico, Chen, Shang, Benedikt, Jan, von Keudell, Achim

Journal:

Applied Physics Letters

Année:

2012

Langue:

english

Fichier:

PDF, 419 KB

english, 2012

14

Calibration of a miniaturized retarding field analyzer for low-temperature plasmas: geometrical transparency and collisional effects

Baloniak, Tim, Reuter, Rüdiger, Flötgen, Christoph, von Keudell, Achim

Journal:

Journal of Physics D Applied Physics

Année:

2010

Langue:

english

Fichier:

PDF, 596 KB

english, 2010

15

Chemical and Physical Sputtering of Polyethylene Terephthalate (PET)

Große-Kreul, Simon, Corbella, Carles, von Keudell, Achim

Journal:

Plasma Processes and Polymers

Année:

2013

Langue:

english

Fichier:

PDF, 494 KB

english, 2013

16

Thermal conductivity of amorphous carbon thin films

Bullen, Andrew J., OâHara, Keith E., Cahill, David G., Monteiro, Othon, von Keudell, Achim

Journal:

Journal of Applied Physics

Année:

2000

Langue:

english

Fichier:

PDF, 302 KB

english, 2000

17

Consequences of the temperature and flux dependent sticking coefficient of methyl radicals for nuclear fusion experiments

Meier, Matthias, Keudell, Achim von, Jacob, Wolfgang

Journal:

Année:

2003

Langue:

english

Fichier:

PDF, 169 KB

english, 2003

18

Target implantation and redeposition processes during high-power impulse magnetron sputtering of aluminum

Will, Andreas, de los Arcos, Teresa, Corbella, Carles, Hecimovic, Ante, Machura, Patrick D, Winter, Jörg, von Keudell, Achim

Journal:

Journal of Physics D Applied Physics

Année:

2013

Langue:

english

Fichier:

PDF, 356 KB

english, 2013

19

Particle beam experiments for the analysis of reactive sputtering processes in metals and polymer surfaces

Corbella, Carles, Grosse-Kreul, Simon, Kreiter, Oliver, de los Arcos, Teresa, Benedikt, Jan, von Keudell, Achim

Journal:

Review of Scientific Instruments

Année:

2013

Langue:

english

Fichier:

PDF, 1.33 MB

english, 2013

20

Fundamental aspects of substrate biasing: ion velocity distributions and nonlinear effects

Baloniak, Tim, Reuter, Rüdiger, von Keudell, Achim

Journal:

Journal of Physics D Applied Physics

Année:

2010

Langue:

english

Fichier:

PDF, 297 KB

english, 2010

21

Combined In Situ XPS and UHV-Chemical Force Microscopy (CFM) Studies of the Plasma Induced Surface Oxidation of Polypropylene

Ozkaya, Berkem, Grosse-Kreul, Simon, Corbella, Carles, von Keudell, Achim, Grundmeier, Guido

Journal:

Plasma Processes and Polymers

Année:

2014

Langue:

english

Fichier:

PDF, 584 KB

english, 2014

22

Bimodal substrate biasing to control γ-Al2O3 deposition during reactive magnetron sputtering

Prenzel, Marina, Kortmann, Annika, Stein, Adrian, von Keudell, Achim, Nahif, Farwah, Schneider, Jochen M.

Journal:

Journal of Applied Physics

Année:

2013

Langue:

english

Fichier:

PDF, 1.14 MB

english, 2013

23

Fast Time Resolved Techniques as Key to the Understanding of Energy and Particle Transport in HPPMS-Plasmas

Maszl, Christian, Breilmann, Wolfgang, Berscheid, Lars, Benedikt, Jan, von Keudell, Achim

Journal:

IEEE Transactions on Plasma Science

Année:

2014

Langue:

english

Fichier:

PDF, 484 KB

english, 2014

24

Insight into the Reaction Scheme of SiO 2 Film Deposition at Atmospheric Pressure

Rügner, Katja, Reuter, Rüdiger, Ellerweg, Dirk, de los Arcos, Teresa, von Keudell, Achim, Benedikt, Jan

Journal:

Plasma Processes and Polymers

Année:

2013

Langue:

english

Fichier:

PDF, 605 KB

english, 2013

25

Ion-induced oxidation of aluminum during reactive magnetron sputtering

Kreiter, Oliver, Grosse-Kreul, Simon, Corbella, Carles, von Keudell, Achim

Journal:

Journal of Applied Physics

Année:

2013

Langue:

english

Fichier:

PDF, 723 KB

english, 2013

26

Roughness evolution during a-C:H film growth in methane plasmas

Kim, In-Young, Hong, Suk-Ho, Consoli, Angelo, Benedikt, Jan, von Keudell, Achim

Journal:

Journal of Applied Physics

Année:

2006

Langue:

english

Fichier:

PDF, 378 KB

english, 2006

27

Ion-enhanced oxidation of aluminum as a fundamental surface process during target poisoning in reactive magnetron sputtering

Kuschel, Thomas, von Keudell, Achim

Journal:

Journal of Applied Physics

Année:

2010

Langue:

english

Fichier:

PDF, 552 KB

english, 2010

28

Temperature dependence of the sticking coefficient of methyl radicals at hydrocarbon film surfaces

Meier, Matthias, von Keudell, Achim

Journal:

The Journal of Chemical Physics

Année:

2002

Langue:

english

Fichier:

PDF, 396 KB

english, 2002

29

Particle-beam experiment to study heterogeneous surface reactions relevant to plasma-assisted thin film growth and etching

Jacob, Wolfgang, Hopf, Christian, von Keudell, Achim, Meier, Matthias, Schwarz-Selinger, Thomas

Journal:

Review of Scientific Instruments

Année:

2003

Langue:

english

Fichier:

PDF, 621 KB

english, 2003

30

Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films

Prenzel, Marina, de los Arcos, Teresa, Kortmann, Annika, Winter, Jörg, von Keudell, Achim

Journal:

Journal of Applied Physics

Année:

2012

Langue:

english

Fichier:

PDF, 696 KB

english, 2012

31

Development of the sputtering yields of ArF photoresist after the onset of argon ion bombardment

Takeuchi, Takuya, Corbella, Carles, Grosse-Kreul, Simon, von Keudell, Achim, Ishikawa, Kenji, Kondo, Hiroki, Takeda, Keigo, Sekine, Makoto, Hori, Masaru

Journal:

Journal of Applied Physics

Année:

2013

Langue:

english

Fichier:

PDF, 1.61 MB

english, 2013

32

radicals into strained Si-Si surface bonds during plasma deposition of hydrogenated amorphous silicon films

von Keudell, Achim, Abelson, John R.

Journal:

Physical Review B

Année:

1999

Langue:

english

Fichier:

PDF, 161 KB

english, 1999

33

Surface Modification of Polypropylene (PP) by Argon Ions and UV Photons

Große-Kreul, Simon, Corbella, Carles, von Keudell, Achim, Ozkaya, Berkem, Grundmeier, Guido

Journal:

Plasma Processes and Polymers

Année:

2013

Langue:

english

Fichier:

PDF, 388 KB

english, 2013

34

Control of the plasma chemistry of a pulsed inductively coupled methane plasma

Bauer, Martin, Schwarz-Selinger, Thomas, Kang, Hyungdong, Keudell, Achim von

Journal:

Plasma Sources Science and Technology

Année:

2005

Langue:

english

Fichier:

PDF, 182 KB

english, 2005

35

Particle-induced oscillations in inductively coupled plasmas

Keudell, Achim von, Bauer, Martin

Journal:

Plasma Sources Science and Technology

Année:

2004

Langue:

english

Fichier:

PDF, 291 KB

english, 2004

36

Back Cover: Plasma Process. Polym. 9∕2015

Grundmeier, Guido, von Keudell, Achim, de los Arcos, Teresa

Journal:

Plasma Processes and Polymers

Année:

2015

Fichier:

PDF, 64 KB

2015

37

Sampling of ions at atmospheric pressure: ion transmission and ion energy studied by simulation and experiment

Große-Kreul, Simon, Hübner, Simon, Benedikt, Jan, von Keudell, Achim

Journal:

The European Physical Journal D / Atomic, Molecular, Optical and Plasma Physics

Année:

2016

Langue:

english

Fichier:

PDF, 1.43 MB

english, 2016

38

Revising secondary electron yields of ion-sputtered metal oxides

Corbella, Carles, Marcak, Adrian, de los Arcos, Teresa, von Keudell, Achim

Journal:

Journal of Physics D Applied Physics

Année:

2016

Langue:

english

Fichier:

PDF, 585 KB

english, 2016

39

Fundamentals and Applications of Reflection FTIR Spectroscopy for the Analysis of Plasma Processes at Materials Interfaces

Grundmeier, Guido, von Keudell, Achim, de los Arcos, Teresa

Journal:

Plasma Processes and Polymers

Année:

2015

Langue:

english

Fichier:

PDF, 3.10 MB

english, 2015

40

Exploring the Structure of the Modified Top Layer of Polypropylene During Plasma Treatment

Corbella, Carles, Große-Kreul, Simon, von Keudell, Achim

Journal:

Plasma Processes and Polymers

Année:

2015

Langue:

english

Fichier:

PDF, 1.03 MB

english, 2015

41

Gepulste Hochleistungs-Magnetron-Plasmen (HPPMS)

von Keudell, Achim, Hecimovic, Ante, Maszl, Christian

Journal:

Vakuum in Forschung und Praxis

Année:

2016

Langue:

german

Fichier:

PDF, 283 KB

german, 2016

42

Methods of gas purification and effect on the ion composition in an RF atmospheric pressure plasma jet investigated by mass spectrometry

Große-Kreul, Simon, Hübner, Simon, Schneider, Simon, von Keudell, Achim, Benedikt, Jan

Journal:

EPJ Techniques and Instrumentation

Année:

2016

Langue:

english

Fichier:

PDF, 840 KB

english, 2016

43

Elementary surface processes during reactive magnetron sputtering of chromium

Monje, Sascha, Corbella, Carles, von Keudell, Achim

Journal:

Journal of Applied Physics

Année:

2015

Langue:

english

Fichier:

PDF, 1.08 MB

english, 2015

44

Infrared analysis of thin films: amorphous, hydrogenated carbon on silicon

Jacob, Wolfgang, Keudell, Achim von, Schwarz-Selinger, Thomas

Journal:

Brazilian Journal of Physics

Année:

2000

Langue:

english

Fichier:

PDF, 262 KB

english, 2000

45

Electric potential screening on metal targets submitted to reactive sputtering

Corbella, Carles, Marcak, Adrian, von Keudell, Achim, de los Arcos, Teresa

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

2017

Langue:

english

Fichier:

PDF, 1.52 MB

english, 2017

46

Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnostics

Layes, Vincent, Monje, Sascha, Corbella, Carles, Schulz-von der Gathen, Volker, von Keudell, Achim, de los Arcos, Teresa

Journal:

Journal of Applied Physics

Année:

2017

Langue:

english

Fichier:

PDF, 2.74 MB

english, 2017

47

Note: Ion-induced secondary electron emission from oxidized metal surfaces measured in a particle beam reactor

Marcak, Adrian, Corbella, Carles, de los Arcos, Teresa, von Keudell, Achim

Journal:

Review of Scientific Instruments

Année:

2015

Langue:

english

Fichier:

PDF, 475 KB

english, 2015

48

Review Article: Unraveling synergistic effects in plasma-surface processes by means of beam experiments

von Keudell, Achim, Corbella, Carles

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

2017

Langue:

english

Fichier:

PDF, 1.33 MB

english, 2017

49

Correlative plasma-surface model for metastable Cr-Al-N: Frenkel pair formation and influence of the stress state on the elastic properties

Music, Denis, Banko, Lars, Ruess, Holger, Engels, Martin, Hecimovic, Ante, Grochla, Dario, Rogalla, Detlef, Brögelmann, Tobias, Ludwig, Alfred, von Keudell, Achim, Bobzin, Kirsten, Schneider, Jochen M

Journal:

Journal of Applied Physics

Année:

2017

Langue:

english

Fichier:

PDF, 2.42 MB

english, 2017

50

Absolutely calibrated mass spectrometry measurement of reactive and stable plasma chemistry products in the effluent of a He-H2O atmospheric plasma.

Willems, Gert, Benedikt, Jan, von Keudell, Achim

Journal:

Journal of Physics D Applied Physics

Année:

2017

Langue:

english

Fichier:

PDF, 618 KB

english, 2017